Silicon Micromachining for High Performance Passive Structures at W Band

Silicon Micromachining for High Performance Passive Structures at W Band

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This paper presents a micromachined technology allowing the realization of very high aspect ratio millimeter-wave circuits.Appropriate 3D electromagnetic simulations Multivitamin based on the finite element method have been implemented to design the circuits.Coplanar transmission lines featuring loss level in the 2 dB range up to 105 GHz have been realized.An original silicon micromachined cavity using the Figure Skating - Accessories - Skate Guards whispering gallery modes properties has been realized achieving a quality factor close to 10,000 range at 95 GHz.